The Central Laboratory for Micro- and Nanotechnology (ZMNT) is a shared user facility and the central clean-room of RWTH Aachen University. Currently, ZMNT is distributed over several labs in multiple institutes. The main ZMNT lab (ZMNT – Module 1) provides a clean-room of 1054 m2 with a maximum class 5 of particulate air cleanliness (as […]
Author: Joachim Knoch
Working in the Cleanroom
The Central Laboratory for Micro- and Nanotechnolgy (ZMNT) provides a state-of-the-art microfabrication tool set that allows a great variety of different processes ranging from optical and electron-beam lithography, dry and wet etching, physical and chemical-vapor deposition and thermal processingto exhaustive characterization methods. The clean-room is operated in a way that is strict enough to avoid […]
Teaching at ZMNT
Laboratory courses on e.g. CMOS device fabrication within the bachelor and master programs on physics and electrical engineering are carried out in the Central Laboratory for Micro- and Nanotechnology. After sufficient training, students can fabricate and characterize their own samples using state-of-the-art research equipment.