Arias Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 6″ wafers FOM-Name:Wet Bench Solvents and Resist DevelopmentLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Category: Photolithography
Wet Bench Resist and HMDS Coating
Arias Modus Operandi:User-modeContamination category: A, B, C if appropriate handle wafer and chucks are usedSample-size:Pieces … 6″ wafer FOM-Name:Wet Bench Resist CoatingLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
MA_BA6
SÜSS MicroTec, MA/BA6 Modus Operandi:User-modeContamination category: A,B,C if appropriate chuck and masks are usedSample-size:Pieces … 6″ wafer FOM-Name:Optical Lithography (MABA6)Location:CMNT, Room 009 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Top- and back-side alignment