Tencor, P-10 Modus Operandi:User-ModeContamination category:CSample-size:100 mm, 150 mm, 200mm Wafer FOM-Name:- Profiler Tencor P-10Location:ZMNT, Room 007 Tool manager: Jochen Heiss Instruction video: Not available Tool description: A computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.
Category: Available Characterization Tools
SEM 3 (JEOL)
JEOL, JSM-6700F Modus Operandi:User-modeContamination category:CSample-size:Pieces FOM-Name:- IHT – SEM (JEOL)Location:WSH, Room 24B102 Tool manager: Birger Berghoff Instruction video: Open video Tool description: JEOL, JSM 6700F Cold field-emitter SEM with load-lock
SEM 1 (Zeiss Sigma)
Zeiss, Sigma Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 4″ FOM-Name:- IHT – SEM (Zeiss Sigma)Location:WSH, Room 24B107 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Zeiss, Sigma Thermal field-emitter SEM
micro-Raman Spectrometer
Renishaw, inVia Modus Operandi:User-modeContamination category: A, B, CSample-size:Pieces FOM-Name:- IHT – mu-Raman SpectrometerLocation:WSH, Room 24B120 Tool manager: Birger Berghoff Instruction video: Open video Tool description: µ-Raman spectrometer
Sheet Resistance Measurements (Sherescan)
SunLab, Sherescan Modus Operandi:User-modeContamination category: B, CSample-size:Pieces … 6″ square FOM-Name:- IHT – Sheet Resistance Measurements (Sherescan)Location:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: 4-probe sheet resistance measurements Automatic scans
Hall Measurements
Ecopia, HMS 5000 Modus Operandi:User-modeContamination category: CSample-size:Pieces FOM-Name:- IHT – Hall MeasurementsLocation:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Hall measurement set-up with permanent magents (0.57 T) Van der Pauw measurements Temperature range: 77…350 K
Low- and High-Temp Vac Probe Station
Kammrath & Weiss, Cryo-Stage and Heating Module Modus Operandi:User-modeContamination category: CSample-size:Pieces FOM-Name:- IHT – Low- and High-Temp I-V MeasurementsLocation:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Vacuum probe station with 5 in-situ maneuverable tips Temperatures range with evaporation cryostat: 8…320 K Transfer box can be opened in-situ, equipped with hot-plate that […]
SEM 2 (Zeiss Sigma)
Zeiss, Sigma Modus Operandi: … Contamination category: A, B, C Sample-size: Pieces … 4″ FOM-Name:SEM (GaN-BET)Location:CMNT, Room 004 Tool manager: Frank Jessen Instruction video: Open video Tool description: Zeiss, Sigma
IQE Measurements (PV Tools)
PV Tools, IQE-SCAN Modus Operandi:User-modeContamination category: A, B, CSample-size:Pieces and 6″ solar cells FOM-Name:- IHT – IQE MeasurementsLocation:WSH, Room 24B116 Tool manager: Birger Berghoff Instruction video: Open video Tool description: PV Tools, IQE-SCAN