Keyence, VK-X 200 Modus Operandi:User-modeContamination category:A, B, C if appropriate handle wafer is usedSample-size:Pieces … 6″ wafers FOM-Name:3D Laser Scanning MicroscopeLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: 3D Laser Scanning Confocal Microscope, motorized x-y-z-stage, optical height/profile measurements, used to automated search of 2D material flakes, transfer aparatus for 2D […]
Category: Available Characterization Tools
Spectroscopic Ellipsometer
Accurion, nanofilm_ep4se Modus Operandi:User-modeContamination category: A,B,C if appropriate carrier wafers are usedSample-size:Pieces … 4″ wafer FOM-Name:EllipsometerLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Mapping is possible (100 mm x 100 mm), lateral resolution: 1 μm, spectral range: 360…950 nm Standard Operation Procedure EP4v2.3, Mapping EP4v1.1, Short Manual
Profilometer (DektakXT)
Bruker, DektakXT Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 4″ wafer FOM-Name:ProfilometerLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video1, open video2 Tool description: