Arias Modus Operandi:User-ModeContamination category:CSample-size:100 mm, 150 mm Wafer FOM-Name:- Litho-Bench 2Location:ZMNT, Room 009 Tool manager: Jochen Heiss Instruction video: Not available Tool description: Hotplate small, medium, big (Gestigkeit), Spin Coater (Sawatec, SM 180)
Category: Wet Chemical Processing
Wet Bench for Resist Coating
Arias Modus Operandi:User-ModeContamination category:CSample-size:100 mm, 150 mm Wafer FOM-Name:- Litho-Bench 1Location:ZMNT, Room 009 Tool manager: Jochen Heiss Instruction video: Not available Tool description: Hotplate small, medium, big (Gestigkeit), Spin Coater RC8 (SÜSS MicroTec, RC8 )
Wet Bench for Standard Cleaning (RCA)
Arias Modus Operandi:Service-ModeContamination category:ASample-size:dedicated holder for 2×2 cm2 and 3×3 cm2; 4″, 5″, 6″, 8″ wafers FOM-Name:- AMO – Wet Bench RCALocation:AMO Tool manager: AMO Instruction video: Not available Tool description: Single wafer and batch; cleaning processes
Wet Bench for Lithography Processes
Arias Modus Operandi:Service-ModeContamination category:B Sample-size:wide range of sample and wafer sizes up to 8″ FOM-Name:- AMO – Wet Bench LithographyLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: Single wafer, batch and samples; cleaning and resist processes
Wet Bench for Imprint Processes
Arias Modus Operandi:Service-ModeContamination category:B and C (dedicated halves)Sample-size:pieces – 8″ wafers FOM-Name:- AMO – Went Bench ImprintLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: wet bench right (class C), carrier left (class B)
Wet Benches Solvents, Resists, Developers
Modus Operandi:User-modeContamination category: CSample-size:Pieces … 4″ FOM-Name: – Physik – Wet Benches Location: Physikzentrum, Room 28A313 Tool manager:Natalie BrugerInstruction video:Open videoTool description:Three wet benches for solvents (isopropanol, acetone), resists (incl. spinner and hotplates) and developers.
Wet Bench Solvents and Resist Development
Arias Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 6″ wafers FOM-Name:Wet Bench Solvents and Resist DevelopmentLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Wet Bench Fume Hood
Arias Modus Operandi:User-modeContamination category: A,B (right side),C (left side) if appropriate labware and beakers are usedSample-size:Pieces … 6″ wafers FOM-Name:Wet Bench Fume HoodLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description:
Single Wafer Cleaning
acp, Corwet 200M Modus Operandi:User-modeContamination category: A, BSample-size:4″ wafers only FOM-Name:Single-Wafer CleanerLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Tool description:
Wet Bench Standard Clean (RCA)
Arias Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 8″ wafers FOM-Name:Wet Bench RCALocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: