STRASBAUGH, 6EC Modus Operandi:User-modeContamination category: A, B (C with dedicated polishing pads)Sample-size:4″ FOM-Name:Chemical-Mechanical PolisherLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Open video Tool description: STRASBAUGH, 6EC
Category: Polishing
Single Wafer Cleaning
acp, Corwet 200M Modus Operandi:User-modeContamination category: A, BSample-size:4″ wafers only FOM-Name:Single-Wafer CleanerLocation:CMNT, Room 001 Tool manager: Birger Berghoff Instruction video: Tool description: