DISCO, DAD321 Modus Operandi:Service-modeContamination category: A, BSample-size:Pieces … 4″ FOM-Name: – IHT – Dicing Saw Location: WSH, Room 24B108 Tool manager: Birger Berghoff Instruction video: Open video Tool description: DISCO, DAD321 Dicing saw for wafers up to 150 mm Materials: silicon, quartz, sapphire