Jipelec, JetFirst Modus Operandi:Service-ModeContamination category:CSample-size:up to 6″ wafers; 6″ dummy wafer for samples FOM-Name:- AMO – RTPLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 6″ Rapid Thermal Annealing system up to 1100°C; process gases H2, N2, Ar
Category: Annealing
Wet Oxidation Furnace
Centrotherm Modus Operandi:Service-ModeContamination category:ASample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name:- AMO – Dry Oxidation FurnaceLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
Dry Oxidation Furnace
Centrotherm Modus Operandi:Service-ModeContamination category:ASample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name:- AMO – Dry Oxidation FurnaceLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
Annealer (Self-built)
Self-built Modus Operandi:User-modeContamination category: CSample-size:Pieces FOM-Name:- Physik – AnnealerLocation:Physikzentrum, Room 28A313 Tool manager:Natalie BrugerInstruction video:Open videoTool description: Self-built annealer
RTP (RTP 150)
UniTemp, RTP 150 Modus Operandi:User-modeContamination category: CSample-size:Pieces … 6″ wafers FOM-Name:– IHT – RTP (RTP 150)Location:WSH, Room 24B309 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Inert gas (Ar) annealing, Forming gas annealing, Oxidation (O2)
RTP (AS-One 150)
Annealsys, AS-One 150 Modus Operandi:User-modeContamination category: A, BSample-size:Pieces … 6″ wafers FOM-Name:– IHT – RTP (AS-One 150)Location:WSH, Room 24B101 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Cold-wall RTP with stainless steel chamber, high vacuum, annealing in pure hydrogen possible, process gases: Ar, NH3, O2, H2