SÜSS MicroTec, SB6e Modus Operandi:User-modeContamination category: B,C if appropriate handling tools are usedSample-size:6″ wafers FOM-Name:N.N.Location:CMNT, Room 006 Tool manager: Jochen Heiss Instruction video: Open video Tool description: SÜSS MicroTec, SB6e
Category: Wafer Bonding
MA_BA6
SÜSS MicroTec, MA/BA6 Modus Operandi:User-modeContamination category: A,B,C if appropriate chuck and masks are usedSample-size:Pieces … 6″ wafer FOM-Name:Optical Lithography (MABA6)Location:CMNT, Room 009 Tool manager: Birger Berghoff Instruction video: Open video Tool description: Top- and back-side alignment