Centrotherm Modus Operandi:Service-ModeContamination category:ASample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name:- AMO – Dry Oxidation FurnaceLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
Category: Oxidation
Dry Oxidation Furnace
Centrotherm Modus Operandi:Service-ModeContamination category:ASample-size:up to 200×6″ or up to 50×8″ wafers per run; 15×15 cm tray for samples FOM-Name:- AMO – Dry Oxidation FurnaceLocation:AMO Tool manager: AMO Instruction video: Not available Tool description: 3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm