Nordiko, NS 2550 Duisburg Modus Operandi:Service-ModeContamination category:CSample-size:100 mm, 150 mm Wafer FOM-Name:- Nordiko (Duisburg)Location:ZMNT, Room 007 Tool manager: Jochen HeissInstruction video: Not availableTool description:Targets: Ti, Pl, Iridium, on demand
Category: Sputtering
Sputtering System
Nordiko, NS 2550 Berlin Modus Operandi:Service-ModeContamination category:CSample-size:100 mm, 150 mm Wafer FOM-Name:- Nordiko (Berlin)Location:ZMNT, Room 007 Tool manager: Jochen Heiss Instruction video: Not available Tool description: Targets: Ti, Au, changing, on demand