The Central Laboratory for Micro- and Nanotechnology (ZMNT) is a shared user facility and the central clean-room of RWTH Aachen University. Currently, ZMNT is distributed over several labs in multiple institutes. The main ZMNT lab (ZMNT - Module 1) provides a clean-room of 1054 m2 with a maximum class 5 of particulate air cleanliness (as per DIN EN ISO 14644-1). In the near future the other labs of the facility will be concentrated in a new building (CMNT - Module 2). Module 2 will be spatially connected to Module 1 and will provide an additional clean-room of 1005 m2 (also with a maximum class 5 of particulate air cleanliness). ZMNT will then serve as the core micro- and nanotechnology facility at RWTH Aachen University.
