Profilometer
Bruker, DektakXT
Usage
- Modus Operandi:
User-mode - Contamination category: A, B
- Sample-size:
Pieces ... 4″ wafer
FOM-Name and Location
- FOM-Name:
Profilometer - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video1,
open video2 - Tool description: