Photolithography System (Mask Aligner)
SÜSS MicroTec, MA4
Usage
- Modus Operandi:
User-mode - Contamination category: A,B,C if appropriate chucks and masks are used
- Sample-size:
Pieces ... 4″
FOM-Name and Location
- FOM-Name:
– IHT – Optical Lithography (MA4) - Location: WSH, Room 24B103
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video - Tool description: