HF Vapor Phase Etcher
Idonus Sarl, VPE-150
Usage
- Modus Operandi:
User-mode - Contamination category:
A, B - Sample-size:
Pieces ... 4″
FOM-Name and Location
- FOM-Name:
HF Vapor Phase Etcher - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
- Tool description: