Wet Bench for Standard Cleaning (RCA)
Arias
Usage
- Modus Operandi:
User-mode - Contamination category: A, B
- Sample-size:
Pieces ... 8″ wafers
FOM-Name and Location
- FOM-Name:
Wet Bench RCA - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video - Tool description: