Single-Wafer Cleaning System
acp, Corwet 200M
Usage
- Modus Operandi:
User-mode - Contamination category: A, B
- Sample-size:
4″ wafers only
FOM-Name and Location
- FOM-Name:
Single-Wafer Cleaner - Location:
CMNT, Room 001
Resources
- Tool manager:
Birger Berghoff - Instruction video:
- Tool description: