Electron Beam Lithography System
Raith, RAITH150 Two
Usage
- Modus Operandi:
User-mode - Contamination category: A,B,C if appropriate chucks are used
- Sample-size:
Pieces ... 6″ wafers
FOM-Name and Location
- FOM-Name:
– IHT – E-Beam Litho (RAITH150 Two) - Location:
WSH, Room 24B102
Resources
- Tool manager:
Birger Berghoff - Instruction video:
- Tool description: