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Plasma Asher/SF6 Plasma Etcher

April 26, 2016July 17, 2017 Joachim Knoch Available Processing Tools, Dry Etching

Barrel Plasma Asher/SF6 Plasma Etcher

Oxford Instruments, Plasmalab PRS 90

Usage

  • Modus Operandi:
    User-mode
  • Contamination category:
    B,C if appriate handle wafers are used
  • Sample-size:
    Pieces ... 6″ wafers
Oxford Barrel Plasma Asher/SF6 Plasma EtcherBruker DEKTAK XT

FOM-Name and Location

  • FOM-Name:
    – IHT – Plasma Asher
  • Location:
    WSH, Room 24B132

Resources

  • Tool manager: Birger Berghoff
  • Instruction video: Open video
  • Tool description: 

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Electron-Beam Lithography (RAITH150 Two)
Laser Scanning Microscope

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    • Metallization (7)
    • Nanoimprint Lithography (4)
    • Oxidation (2)
    • Photolithography (14)
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    • Polishing (2)
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    • Wafer Bonding (2)
    • Wet Chemical Processing (12)
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