Rapid Thermal Processing Furnace
UniTemp, RTP 150
Usage
- Modus Operandi:
User-mode - Contamination category: C
- Sample-size:
Pieces ... 6″ wafers
FOM-Name and Location
- FOM-Name:
– IHT – RTP (RTP 150) - Location:
WSH, Room 24B309
Resources
- Tool manager:
Birger Berghoff - Instruction video:
Open video - Tool description:
Inert gas (Ar) annealing,
Forming gas annealing,
Oxidation (O2)