Plasma Asher
Tegal, 915
Usage
- Modus Operandi:
User-mode - Contamination category: B,C (B if appropriate handling wafer is used)
- Sample-size:
Pieces ... 6″ wafers
FOM-Name and Location
- FOM-Name:
N.N. - Location:
CMNT, Room 009
Resources
- Tool manager:
Jochen Heiss - Instruction video:
Open video - Tool description:
Tegal, 915