Wet Benches Solvents, Resists, Developers

Joachim Knoch Available Processing Tools, Electron-Beam Lithography, Photolithography, Wet Chemical Processing

Wet Benches for Solvents, Resists and Developers

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: C
  • Sample-size:
    Pieces ... 4″
Physik Wetbenches

FOM-Name and Location

  • FOM-Name:
    - Physik - Wet Benches
  • Location:
    Physikzentrum, Room 28A313

Resources

  • Tool manager:
    Natalie Bruger
  • Instruction video:
    Open video
  • Tool description:
    Three wet benches for solvents (isopropanol, acetone), resists (incl. spinner and hotplates) and developers.