Electron-Beam Lithography System
RAITH, eLINE
Usage
- Modus Operandi:
User-mode - Contamination category: B, C
- Sample-size:
Pieces ... 4″
FOM-Name and Location
- FOM-Name:
- Physik - E-Beam Litho (Raith eLINE) - Location:
Physikzentrum, Room 28A315
Resources
- Tool manager:
Lars Schreiber - Instruction video:
Open video - Tool description:
Raith, eLINE