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Mask Aligner (MJB3)

June 2, 2016October 11, 2016 Joachim Knoch Available Processing Tools, Photolithography

Photolithography System

SÜSS MicroTec, MJB3

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: B, C
  • Sample-size:
    Pieces ... 3″
Mask Aligner MJB3

FOM-Name and Location

  • FOM-Name:
    - Physik - Photolithography System (MJB3)
  • Location:
    Physikzentrum, Room 28A313

Resources

  • Tool manager:
    Arne Hollmann
  • Instruction video:
    Open video
  • Tool description:
    SÜSS MicroTec, MJB3

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