Scanning Electron Microscope
Zeiss, Sigma
Usage
- Modus Operandi:
... - Contamination category: A, B, C
- Sample-size:
Pieces ... 4″
FOM-Name and Location
- FOM-Name:
SEM (GaN-BET) - Location:
CMNT, Room 004
Resources
- Tool manager:
Frank Jessen - Instruction video:
Open video - Tool description:
Zeiss, Sigma