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CMP

June 2, 2016July 17, 2017 Joachim Knoch Available Processing Tools, Polishing

Chemical-Mechanical Polisher

STRASBAUGH, 6EC

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: A, B (C with dedicated polishing pads)
  • Sample-size:
    4″
Chemical Mechanical Polishing

FOM-Name and Location

  • FOM-Name:
    Chemical-Mechanical Polisher
  • Location:
    CMNT, Room 001

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    STRASBAUGH, 6EC

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SEM 2 (Zeiss Sigma)
Low- and High-Temp Vac Probe Station

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Collaborators

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