Sheet Resistance Measurements (Sherescan)

Joachim Knoch Available Characterization Tools

Sheet Resistance Measurement System

SunLab, Sherescan

Usage

  • Modus Operandi:
    User-mode
  • Contamination category: B, C
  • Sample-size:
    Pieces ... 6″ square
Resistivity Measurements

FOM-Name and Location

  • FOM-Name:
    - IHT - Sheet Resistance Measurements (Sherescan)
  • Location:
    WSH, Room 24B116

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    4-probe sheet resistance measurements
    Automatic scans