SEM 3 (JEOL)

Scanning Electron Microscope

JEOL, JSM-6700F

Usage

  • Modus Operandi:
    User-mode
  • Contamination category:
    C
  • Sample-size:
    Pieces
JEOL SEM

FOM-Name and Location

  • FOM-Name:
    - IHT - SEM (JEOL)
  • Location:
    WSH, Room 24B102

Resources

  • Tool manager:
    Birger Berghoff
  • Instruction video:
    Open video
  • Tool description:
    JEOL, JSM 6700F
    Cold field-emitter SEM with load-lock