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ZMNT – RWTH Aachen Univerity
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Organization

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– Institutes Involved in CMNT
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Categories

  • Available Characterization Tools (13)
  • Available Processing Tools (55)
    • Annealing (6)
    • Atomic Layer Deposition (2)
    • Chemical Vapor Deposition (4)
    • Dicing (1)
    • Dry Etching (10)
    • Electron-Beam Lithography (4)
    • Metallization (7)
    • Nanoimprint Lithography (4)
    • Oxidation (2)
    • Photolithography (14)
    • Physical Vapor Depostion (5)
    • Polishing (2)
    • Sputtering (2)
    • Wafer Bonding (2)
    • Wet Chemical Processing (12)
  • Slider Posts (6)

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Collaborators

  • AMO GmbH
  • CDPP
  • Forschungszentrum Jülich
  • Helmholtz Nanoelectronics Facility
  • JARA FIT
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