Automatic Resist Coater and Developer

Joachim Knoch Available Processing Tools, Photolithography

Automatic Resist Coater and Developer

EVG, 150

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    B
  • Sample-size:
    4" - 8" wafers

FOM-Name and Location

  • FOM-Name:
    - AMO - Automatic Resist Coater and Developer
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    4″- 8″ automatic resist coater and developer; AZ MiR701, Primer, AZ5214E