Interference Lithography System

Joachim Knoch Available Processing Tools, Photolithography

Interference Lithography System

Self-made

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    B
  • Sample-size:
    4", 6", 8" and every rectangular shape within

FOM-Name and Location

  • FOM-Name:
    - AMO - Interference Lithography System
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    180 nm – 2.5 μm pitch; stitching free gratings