Soft UV Nanoimprint Lithography Prototype System

Joachim Knoch Available Processing Tools, Nanoimprint Lithography

Soft UV Nanoimprint Lithography Prototype System

EVG, 620

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    B
  • Sample-size:
    4"- 6" flexible template size

FOM-Name and Location

  • FOM-Name:
    - AMO - Soft UV Nanoimprint
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    Soft UV Nanoimprint prototype