Wet Bench for Imprint Processes
Arias
Usage
- Modus Operandi:
Service-Mode - Contamination category:
B and C (dedicated halves) - Sample-size:
pieces - 8" wafers
FOM-Name and Location
- FOM-Name:
- AMO - Went Bench Imprint - Location:
AMO
Resources
- Tool manager:
AMO - Instruction video:
Not available - Tool description:
wet bench right (class C), carrier left (class B)