Wet Bench for Standard Cleaning (RCA)

Joachim Knoch Available Processing Tools, Wet Chemical Processing

Wet Bench for Standard Cleaning (RCA)

Arias

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    A
  • Sample-size:
    dedicated holder for 2x2 cm2 and 3x3 cm2; 4", 5", 6", 8" wafers

FOM-Name and Location

  • FOM-Name:
    - AMO - Wet Bench RCA
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    Single wafer and batch; cleaning processes