Wet Oxidation Furnace

Joachim Knoch Annealing, Available Processing Tools, Oxidation

Dry Oxidation Furnace

Centrotherm

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    A
  • Sample-size:
    up to 200x6" or up to 50x8" wafers per run; 15x15 cm tray for samples

FOM-Name and Location

  • FOM-Name:
    - AMO - Dry Oxidation Furnace
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm