Rapid Thermal Processing Furnace

Joachim Knoch Annealing, Available Processing Tools

Rapid Thermal Processing Furnace

Jipelec, JetFirst

Usage

  • Modus Operandi:
    Service-Mode
  • Contamination category:
    C
  • Sample-size:
    up to 6" wafers; 6" dummy wafer for samples

FOM-Name and Location

  • FOM-Name:
    - AMO - RTP
  • Location:
    AMO

Resources

  • Tool manager:
    AMO
  • Instruction video:
    Not available
  • Tool description:
    6″ Rapid Thermal Annealing system up to 1100°C; process gases H2, N2, Ar