Electron-Beam and Thermal Evaporation System
Pfeiffer Vacuume, Classic 580
Usage
- Modus Operandi:
Service-Mode - Contamination category:
C - Sample-size:
4"-, 5"- and 6"-wafers; sample size up to 6"
FOM-Name and Location
- FOM-Name:
- AMO - Evaporator - Location:
AMO
Resources
- Tool manager:
AMO - Instruction video:
Not available - Tool description:
6″ e-beam and resistive evaporator; Materials: Al, Cr, SiO2, Ti, Ta2O5, etc.; process gases: N2, O2