Sputtering System
Nordiko, NS 2550 Duisburg
Usage
- Modus Operandi:
Service-Mode - Contamination category:
C - Sample-size:
100 mm, 150 mm Wafer
FOM-Name and Location
- FOM-Name:
- Nordiko (Duisburg) - Location:
ZMNT, Room 007
Resources
- Tool manager:
Jochen Heiss - Instruction video:
Not available - Tool description:
Targets: Ti, Pl, Iridium, on demand