Annealing

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  • Rapid Thermal Processing Furnace

    Jipelec, JetFirst

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      C
    • Sample-size:
      up to 6" wafers; 6" dummy wafer for samples

    FOM-Name and Location

    • FOM-Name:
      - AMO - RTP
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      6″ Rapid Thermal Annealing system up to 1100°C; process gases H2, N2, Ar
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  • Dry Oxidation Furnace

    Centrotherm

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      A
    • Sample-size:
      up to 200x6" or up to 50x8" wafers per run; 15x15 cm tray for samples

    FOM-Name and Location

    • FOM-Name:
      - AMO - Dry Oxidation Furnace
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
    Continue reading →

  • Dry Oxidation Furnace

    Centrotherm

    Usage

    • Modus Operandi:
      Service-Mode
    • Contamination category:
      A
    • Sample-size:
      up to 200x6" or up to 50x8" wafers per run; 15x15 cm tray for samples

    FOM-Name and Location

    • FOM-Name:
      - AMO - Dry Oxidation Furnace
    • Location:
      AMO

    Resources

    • Tool manager:
      AMO
    • Instruction video:
      Not available
    • Tool description:
      3″ – 8″ Centrotherm furnace; dry oxidation up to 300 nm
    Continue reading →

  • Annealer

    Self-built

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: C
    • Sample-size:
      Pieces
    Physik Annealer

    FOM-Name and Location

    • FOM-Name:
      - Physik - Annealer
    • Location:
      Physikzentrum, Room 28A313

    Resources

    • Tool manager:
      Natalie Bruger
    • Instruction video:
      Open video
    • Tool description:
             Self-built annealer
    Continue reading →

  • Rapid Thermal Processing Furnace

    UniTemp, RTP 150

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: C
    • Sample-size:
      Pieces ... 6″ wafers
    UniTemp Rapid Thermal Annealing/Oxidation

    FOM-Name and Location

    • FOM-Name:
      – IHT – RTP (RTP 150)
    • Location:
      WSH, Room 24B309

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      Inert gas (Ar) annealing,
      Forming gas annealing,
      Oxidation (O2)
    Continue reading →

  • Rapid Thermal Processing Furnace

    Annealsys, AS-One 150

    Usage

    • Modus Operandi:
      User-mode
    • Contamination category: A, B
    • Sample-size:
      Pieces ... 6″ wafers
    AnnealSys AS-One 150 Rapid Thermal Annealing/Oxidation/H2 Anneal/Nitridation

    FOM-Name and Location

    • FOM-Name:
      – IHT – RTP (AS-One 150)
    • Location:
      WSH, Room 24B101

    Resources

    • Tool manager:
      Birger Berghoff
    • Instruction video:
      Open video
    • Tool description:
      Cold-wall RTP with stainless steel chamber,
      high vacuum,
      annealing in pure hydrogen possible,
      process gases: Ar, NH3, O2, H2
    Continue reading →


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